Publication Beamlines Strategic Pillar
Klymyshyn, D.; Boerner, M.; Haluzan, D.; Wells, G.; Schaffer, M. et al. (2011). Mechanical Planarization with Electropolishing to Improve the Performance of High-Aspect-Ratio RF MEMS Circuits. In 9th Conference on High Aspect Ratio Micro Structure Technology (HARMST). . .