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SGM, VLS-PGM |
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Venu Varanasi; Pranesh Aswath; Megen Maginot; Nickolay V. Lavrick (2016). Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphous Silicon Nitride Thin Films and Uses Thereof. Patent Number: US20160067387A1. |
SGM, VLS-PGM |
Patent |
Materials |
Venu Varanasi; Pranesh Aswath; Megen Maginot; Nickolay V. Lavrick (2021). Amorphous silicon oxide, amorphous silicon oxynitride, and amorphous silicon nitride thin films and uses thereof. Patent Number: US10898618B2. |
SGM, VLS-PGM |
Patent |
Materials |
Venu Varanasi; Pranesh Aswath; Megen Maginot; Nickolay V. Lavrick (2016). Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphous Silicon Nitride Thin Films and Uses Thereof. Patent Number: US20160067387A1. |
SGM, VLS-PGM |
Patent |
Materials |
Venu Varanasi; Pranesh Aswath; Philip Kramer; Megen Velten; Azhar Ilyas et al. (2020). SiâOâNâP related fabrication methods, surface treatments and uses thereof. Patent Number: US10828393B2. |
SGM, SXRMB, VLS-PGM |
Patent |
Materials |
Venu Varanasi; Pranesh Aswath; Philip Kramer; Megen Velten; Azhar Ilyas et al. (2020). SiâOâNâP related fabrication methods, surface treatments and uses thereof. Patent Number: US10828393B2. |
SGM, SXRMB, VLS-PGM |
Patent |
Materials |
Venu Varanasi; Pranesh Aswath; Philip Kramer; Megen Velten; Azhar Ilyas et al. (2020). SiâOâNâP related fabrication methods, surface treatments and uses thereof. Patent Number: US10828393B2. |
SGM, SXRMB, VLS-PGM |
Patent |
Materials |