Publication Beamlines Strategic Pillar
Achenbach, Sven; Shen, Chen; Wells, Garth (2018). Numerical and experimental thermal analysis of polyimide-based x-ray masks at the Canadian Light Source. Journal of Vacuum Science and Technology B 36(1) , 012001. 10.1116/1.5005115. SYLMAND
Achenbach, Sven; Wells, Garth; Jacobs, Michael; Moazed, Banafsheh; Iyer, Swathi et al. (2018). Polymer-based X-ray masks patterned by direct laser writing. Review of Scientific Instruments 89(11) , 115001. 10.1063/1.5041916. SYLMAND Materials
Achenbach, Sven; Wells, Garth; Shen, Chen (2018). Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation. Journal of Synchrotron Radiation 25(3) , 729-737. 10.1107/s1600577518004939. SYLMAND