Publication Beamlines Strategic Pillar
Breil; N.; Carr; A.; Kuratomi et al. (2017). Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures. . 10.23919/vlsit.2017.7998177. IDEAS
Agyeman-Budu; David N.; Choudhury; Sanjukta; Coulthard et al. (2016). Germanium collimating micro-channel arrays for high resolution, high energy confocal X-ray fluorescence microscopy. Patent Number: 10.1063/1.4961132. CLS-APS