Publication Beamlines Strategic Pillar
Venu Varanasi; Pranesh Aswath; Megen Maginot; Nickolay V. Lavrick (2021). Amorphous silicon oxide, amorphous silicon oxynitride, and amorphous silicon nitride thin films and uses thereof. Patent Number: US10898618B2. SGM, VLS-PGM Materials
Venu Varanasi; Pranesh Aswath; Philip Kramer; Megen Velten; Azhar Ilyas et al. (2020). Si—O—N—P related fabrication methods, surface treatments and uses thereof. Patent Number: US10828393B2. SGM, SXRMB, VLS-PGM Materials