Publication Beamlines Strategic Pillar
Darcy Haluzan (2012). Electrostatically actuated LIGA-MEMS structures with high aspect ratio beams for RF applications and mechanical property extraction. Supervisor: Klymyshyn, David M. Achenbach, Sven. Saskatchewan, Canada: University of Saskatchewan. http://hdl.handle.net/10388/ETD-2012-09-727. SYLMAND Materials