Publication Beamlines Strategic Pillar
Achenbach, Sven; Shen, Chen; Wells, Garth (2018). Numerical and experimental thermal analysis of polyimide-based x-ray masks at the Canadian Light Source. Journal of Vacuum Science and Technology B 36(1) , 012001. 10.1116/1.5005115. SYLMAND
Achenbach, Sven; Klymyshyn, David; Mappes, Timo; Kachayev, Anton; Subramanian, Venkat et al. (2008). Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off. Microsystem Technologies 14(9-11) , 1715-1719. 10.1007/s00542-007-0498-7. SYLMAND
Achenbach, S.; Hengsbach, S.; Schulz, J.; Mohr, J. (2018). Optimization of laser writer-based UV lithography with high magnification optics to pattern X-ray lithography mask templates. Microsystem Technologies 25(8) . 10.1007/s00542-018-4161-2. SYLMAND Materials
Achenbach, S.; Haluzan, D. T.; Klymyshyn, D. M.; Börner, M.; Mohr, J. et al. (2013). Large tuning ratio high aspect ratio variable capacitors using leveraged bending. Microsystem Technologies 20(10-11) , 1807-1813. 10.1007/s00542-013-1940-7. SYLMAND