Publication Beamlines Strategic Pillar
Dey, Sonal; Yu, Kai-Hung; Consiglio, Steven; Tapily, Kandabara; Hakamata, Takahiro et al. (2017). Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications. Journal of Vacuum Science and Technology A: Vacuum. Surfaces and Films 35(3) , 03E109. 10.1116/1.4979709. IDEAS